Optimization of High Harmonic Generation of Coherent EUV Light for EUV Metrology: Simulations and Experiments

Title
Optimization of High Harmonic Generation of Coherent EUV Light for EUV Metrology: Simulations and Experiments
Authors
김용태전영민김영희정민기Yong Soo KimHamin SungJomsool KimJu Han Lee
Keywords
High Harmonic Generation; EUV
Issue Date
2016-11
Publisher
International Microprocesses and Nanotechnology Conference 2016
Citation
VOL 11P-11-98L
URI
http://pubs.kist.re.kr/handle/123456789/64677
Appears in Collections:
KIST Publication > Conference Paper
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