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Issue Date | Title | Author(s) |
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2002-01 | Comparison of TiN and TiAlN as a diffusion barrier deposited by atomic layer deposition | Kim, JY; Kim, HK; Kim, Y; Kim, YD; Kim, WM; Jeon, H |
2002-11 | Metalorganic atomic layer deposition of TiN thin films using TDMAT and NH3 | Kim, HK; Kim, JY; Park, JY; Kim, Y; Kim, YD; Jeon, H; Kim, WM |
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