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이중모드　플라즈마　이온주입장치　및 이를　사용한　표면개질방법

Author

한승희

Assignee

한국과학기술연구원

Regitration Date

1998-02-11

Registration No.

0137704

Application Date

1994-11-25

Application No.

1994-0031178

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/100033

Appears in Collections:

KIST Patent > Others

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