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600 mm wide linear stationary plasma thruster (LSPT) for a large area ion beam modification

Authors

Park Dong Hee; CHOI, WON-KOOK

Citation

Society of Vacuum Coater, pp.37 - 39

Keywords

linear stationary plasma thruster; ion beam modification; polymer surface; ion current density

URI

https://pubs.kist.re.kr/handle/201004/100101

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KIST Conference Paper > Others

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