Examination of characteristics dependence of rf sputtered YBCO thin films on oxygen partial pressure by optical emission spectroscopy

Title
Examination of characteristics dependence of rf sputtered YBCO thin films on oxygen partial pressure by optical emission spectroscopy
Authors
김영환조운조Jong-Min Lee최상삼한택상박순자
Keywords
high Tc superconductor; optical emission spectroscopy; oxygen partial pressure; smooth surface
Issue Date
1997-08
Publisher
Proceedings of the 7th Korean Conference on Materials and Applications of Superconductivity
Citation
, 218-222
URI
http://pubs.kist.re.kr/handle/201004/10048
Appears in Collections:
KIST Publication > Conference Paper
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