BS/channeling studies on the heteroepitaxially grown Y2O3 films on Si substrates by UHV-ICB deposition

Title
BS/channeling studies on the heteroepitaxially grown Y2O3 films on Si substrates by UHV-ICB deposition
Authors
김효배조만호황보상우최성창최원국오정아송종한황정남
Keywords
backscattering
Issue Date
1997-08
Publisher
한국진공학회지; Journal of the Korean Vacuum Society
Citation
VOL 6, NO 3, 235-241
URI
http://pubs.kist.re.kr/handle/201004/10049
ISSN
12258822
Appears in Collections:
KIST Publication > Article
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