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Research Activities on PIII&D(Plasma Immersion Ion Implantation and Deposition) Technology at KIST

Authors

HAN, SEUNG HEE; Park Won Woong; JEON JUN HONG; Choi Jin-young

Citation

MRS-J, 2009

URI

https://pubs.kist.re.kr/handle/201004/100505

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KIST Conference Paper > Others

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