Diffusion barrier properties of mo compound thin films

Title
Diffusion barrier properties of mo compound thin films
Authors
김지형이용혁권용성염근영송종한
Keywords
diffusion barrier
Issue Date
1997-05
Publisher
Journal of the Korean vacuum society; 한국진공학회지
Citation
VOL 6, NO 2, 143-150
URI
http://pubs.kist.re.kr/handle/201004/10059
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE