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dc.contributor.author김지형-
dc.contributor.author이용혁-
dc.contributor.author권용성-
dc.contributor.author염근영-
dc.contributor.author송종한-
dc.date.accessioned2015-12-02T04:52:12Z-
dc.date.available2015-12-02T04:52:12Z-
dc.date.issued199705-
dc.identifier.citationVOL 6, NO 2, 143-150-
dc.identifier.other7760-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/10059-
dc.publisherJournal of the Korean vacuum society-
dc.publisher한국진공학회지-
dc.subjectdiffusion barrier-
dc.titleDiffusion barrier properties of mo compound thin films-
dc.typeArticle-
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