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Amorphous-Nanocrystalline Silicon Plasma Enhanced CVD Grown on Porous Alumina Substrate

Authors

A. Khodin; Lee, Joong Kee; Chang-Sam Kim; Kim Sang Ok

Citation

9th IEEE Conference on Nanotechnology, pp.659 - 661

Keywords

amorphous silicon; thin film; CVD; alumina; nanocrystals; composite materials

ISSN

-

URI

https://pubs.kist.re.kr/handle/201004/100738

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KIST Conference Paper > Others

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