The effect of low temperature GaN-buffer layer on the growth of thick GaN using HVPE

Title
The effect of low temperature GaN-buffer layer on the growth of thick GaN using HVPE
Authors
이정욱백호선유지범김긍호금동화
Keywords
Hydride Vapor Phase Epitaxy(HVPE); GaN-buffer; thick GaN film; cross sectional TEM
Issue Date
1998-10
Publisher
대한금속학회회보; Bull. Kor. Inst. Met. & Mater.
Citation
VOL 11, NO 5, 499-504
URI
http://pubs.kist.re.kr/handle/201004/10086
ISSN
1225-1550
Appears in Collections:
KIST Publication > Conference Paper
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