Deposition of ZnO Thin Film coating SnOx buffer layer on glass substrate prepared by Atomic Layer Deposition

Authors
장삼석Ji Hun ParkLee, Joong Kee변동진
Citation
Seven Asian-European International Conference on Plasma Surface Engineering
Keywords
optical; Electrical; Structural; buffer layer; ALD; ZnO-SnOx
URI
https://pubs.kist.re.kr/handle/201004/101106
Appears in Collections:
KIST Conference Paper > Others
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