MEMS-IR sensor fabrication and characterization

Title
MEMS-IR sensor fabrication and characterization
Authors
주병권박흥우박윤권박정호김철주염상섭서상희오명환
Keywords
MEMS
Issue Date
1998-11
Publisher
제 9 회 적외선 영상 센서 Conference
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/10115
Appears in Collections:
KIST Publication > Conference Paper
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