Silicon-to-silicon electrostatic bonding using lithia-silicate glass interlayer

Title
Silicon-to-silicon electrostatic bonding using lithia-silicate glass interlayer
Authors
정지원주병권최두진오명환
Keywords
MEMS
Issue Date
1998-04
Publisher
한국요업학회 춘계연구발표회
Citation
, 92-92
URI
http://pubs.kist.re.kr/handle/201004/10124
Appears in Collections:
KIST Publication > Conference Paper
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