DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author김영석-
dc.contributor.author장삼석-
dc.contributor.author이승무-
dc.contributor.authorJi Hun Park-
dc.contributor.author변동진-
dc.date.accessioned2024-01-13T02:31:14Z-
dc.date.available2024-01-13T02:31:14Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/101438-
dc.subjectZnO-
dc.subjectReactive Sputtering-
dc.subjectmetal Zn-
dc.title.alternative금속 Zn 타겟을 사용한 RF 마그네트론 리엑티브 스퍼터링 ZnO의 온도 및 산소분압에 따른 전기적 특성의 변화-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국재료학회-
dc.citation.title한국재료학회-
dc.citation.conferencePlaceKO-
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