Improvement of bonding properties by pre-bonding at room temperature in Si-glass electrostatic bonding process

Title
Improvement of bonding properties by pre-bonding at room temperature in Si-glass electrostatic bonding process
Authors
주병권이덕중이윤희이남양한정인조경익오명환
Keywords
modified electrostatic bonding; hydrophilization; initial Van der Waals bonding; stabilization; Si-glass bonding
Issue Date
1998-08
Publisher
전기학회논문지; Transactions of the Korean Institute of Electrical Engneers
Citation
VOL 47, NO 8, 1269-1276
URI
http://pubs.kist.re.kr/handle/201004/10161
ISSN
0254-4172
Appears in Collections:
KIST Publication > Article
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