Improvement of bonding properties by pre-bonding at room temperature in Si-glass electrostatic bonding process
- Improvement of bonding properties by pre-bonding at room temperature in Si-glass electrostatic bonding process
- 주병권; 이덕중; 이윤희; 이남양; 한정인; 조경익; 오명환
- modified electrostatic bonding; hydrophilization; initial Van der Waals bonding; stabilization; Si-glass bonding
- Issue Date
- 전기학회논문지; Transactions of the Korean Institute of Electrical Engneers
- VOL 47, NO 8, 1269-1276
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- KIST Publication > Article
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