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dc.contributor.authorJeung-hyun Jeong-
dc.contributor.authorJONG-KEUK, PARK-
dc.contributor.authorYun Ju Heon-
dc.contributor.authorHwang Gyu Weon-
dc.contributor.authorLee, Wook Seong-
dc.contributor.authorBaik, Young Joon-
dc.date.accessioned2024-01-13T03:01:02Z-
dc.date.available2024-01-13T03:01:02Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/101688-
dc.languageEnglish-
dc.subjectNanocrystalline diamond film-
dc.subjectPiezoelectric-
dc.subjectCantilever beam-
dc.subjectMicro actuators and sensors-
dc.titleDemonstration of Micro-cantilever Devices using Pb(Zr,Ti)O3 Thin Films SOl-gel Processed on Nanocrystalline Diamond Thin Films-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationMaterials Research Society-
dc.citation.titleMaterials Research Society-
dc.citation.conferencePlaceUS-
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