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In-situ TEM Investigation on Nucleation and growth behavior of Si Thin Films

Authors

Kim Kyou Hyun; Jin-Ha Whang; Ahn, Jae Pyoung

Citation

APMC9, v.1, no.1, pp.95

Keywords

TEM; PDP; EELS

URI

https://pubs.kist.re.kr/handle/201004/101717

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KIST Conference Paper > Others

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