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dc.contributor.author채경수-
dc.contributor.author문성욱-
dc.contributor.author오명환-
dc.contributor.author박영균-
dc.contributor.author김성일-
dc.contributor.author박정호-
dc.date.accessioned2015-12-02T04:53:00Z-
dc.date.available2015-12-02T04:53:00Z-
dc.date.issued199911-
dc.identifier.citationVOL 10, NO 1, 193-197-
dc.identifier.other10518-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/10184-
dc.publisher센서학회지-
dc.subject초소형 광스위치-
dc.titleA modeling of electrostatic capacitance and moving force in comb actuator for controlling a micro-optical switch-
dc.typeConference Paper-
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KIST Publication > Conference Paper
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