Fabrication of piezoresistive pressure sensor based on poly-Si

Title
Fabrication of piezoresistive pressure sensor based on poly-Si
Authors
임재홍윤석진주병권윤영수
Keywords
piezoresistivity
Issue Date
1999-11
Publisher
한국센서학회 종합학술대회 논문집
Citation
, 287-290
URI
http://pubs.kist.re.kr/handle/201004/10190
Appears in Collections:
KIST Publication > Conference Paper
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