DSpace at KIST: MEMS Fabrication of Microchannel with Poly-Silicon Layer and Application to Microchip Electrophoresis

Full metadata record

DC Field	Value	Language
dc.contributor.author	Kim Tae Ha	-
dc.contributor.author	Myung-Suk Chun	-
dc.contributor.author	Kangtaek Lee	-
dc.date.accessioned	2024-01-13T03:30:48Z	-
dc.date.available	2024-01-13T03:30:48Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/101938	-
dc.language	English	-
dc.subject	MEMS Fabrication	-
dc.subject	Microchip Electrophoresis	-
dc.subject	Microchannel	-
dc.subject	Optical Slit	-
dc.subject	DRIE	-
dc.title	MEMS Fabrication of Microchannel with Poly-Silicon Layer and Application to Microchip Electrophoresis	-
dc.title.alternative	다결정 실리콘 층이 형성된 마이크로 채널의 MEMS 가공 제작과 마이크로 칩 전기영동에의 응용	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	제9회 한국 MEMS 학술대회, v.9, pp.598 - 601	-
dc.citation.title	제9회 한국 MEMS 학술대회	-
dc.citation.volume	9	-
dc.citation.startPage	598	-
dc.citation.endPage	601	-
dc.citation.conferencePlace	KO	-

Show Simple Item Record

KIST Library Institutional Repository