Micro optical switch with self recognition function for displacement using comb actuator

Title
Micro optical switch with self recognition function for displacement using comb actuator
Authors
문성욱채경수오명환박정호
Keywords
comb actuator; 변위 자가 인식 기능; 초소형 광스위치
Issue Date
1999-11
Publisher
99 Photonics Conference
Citation
, 281-282
URI
http://pubs.kist.re.kr/handle/201004/10198
Appears in Collections:
KIST Publication > Conference Paper
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