Influences of plasma treatment on the electrical characteristics of rf-magnetron sputtered BaTa2O6 thin films
- Title
- Influences of plasma treatment on the electrical characteristics of rf-magnetron sputtered BaTa2O6 thin films
- Authors
- 김영식; 이윤희; 주병권; 성만영; 오명환
- Keywords
- FED; BaTa2O6 thin films; ACTFELD; Oxygen Plasma treatment; High dielectric donstant
- Issue Date
- 1999-05
- Publisher
- 대한전기학회논문지 : 전기물성,응용부문 C; The Transactions of The Korean Institute of Electrical Engineers
- Citation
- VOL 48C, NO 5, 319-325
- URI
- http://pubs.kist.re.kr/handle/201004/10227
- Appears in Collections:
- KIST Publication > Article
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