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Influences of plasma treatment on the electrical characteristics of rf-magnetron sputtered BaTa2O6 thin films

Title
Influences of plasma treatment on the electrical characteristics of rf-magnetron sputtered BaTa2O6 thin films
Authors
김영식; 이윤희; 주병권; 성만영; 오명환
Keywords
FED; BaTa2O6 thin films; ACTFELD; Oxygen Plasma treatment; High dielectric donstant
Issue Date
1999-05
Publisher
대한전기학회논문지 : 전기물성,응용부문 C; The Transactions of The Korean Institute of Electrical Engineers
Citation
VOL 48C, NO 5, 319-325
URI
http://pubs.kist.re.kr/handle/201004/10227
Appears in Collections:
KIST Publication > Article
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