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High Resolution Fluorescent Photopatterning in Polymer Films by Chemical Amplification Lithography

Authors

Ahn, Kwang-Duk

Citation

Asia Polymer Symposium APOSYM 2008

Keywords

photoimaging; fluorescence patterns; dry imsging process; lithography

URI

https://pubs.kist.re.kr/handle/201004/102437

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KIST Conference Paper > Others

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