Characteristic estimation of the formation and etching of PZT thin films for pyroelectric IR sensor application

Title
Characteristic estimation of the formation and etching of PZT thin films for pyroelectric IR sensor application
Authors
박윤권주병권전호승윤영수오영제이윤희서상희오명환김철주
Keywords
pyroelectric sensor; PZT film; MEMSS; micromachining
Issue Date
1999-07
Publisher
1999년도 대한전기학회 하계학술대회 논문집
Citation
, 3304-3306
URI
http://pubs.kist.re.kr/handle/201004/10249
Appears in Collections:
KIST Publication > Conference Paper
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