Development of PA-MOCVD machine with glow discharge : Application to the surface properties of metallic bipolar plate

Authors
Kwon, Oh JibLee, Young KookHAN, SEUNG HEEEric Fleury
Citation
대한금속재료학회
Keywords
PAMOCVD; TiN; Glow discharge
URI
https://pubs.kist.re.kr/handle/201004/102505
Appears in Collections:
KIST Conference Paper > Others
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