Deposition of Poly[2-(perfluorooctyl)ethyl acrylate] on Silicon Wafers by the Displacement of Two Immiscible Supercritical Phases (DISP)

Authors
Kim, JaehoonJ. McClainR. Carbonell
Citation
한국화학공학회
Keywords
Deposition; Poly[2-(perfluorooctyl)ethyl acrylate]; Supercritical Fluids
URI
https://pubs.kist.re.kr/handle/201004/102569
Appears in Collections:
KIST Conference Paper > Others
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