Study of the fabrication of a thermal isolation structure for a microbolometer

Title
Study of the fabrication of a thermal isolation structure for a microbolometer
Authors
강호관김민철하원호문성욱오명환김도훈
Keywords
microbolometer; thermal isolation
Issue Date
2000-10
Publisher
새물리
Citation
VOL 41, NO 4, 243-248
URI
http://pubs.kist.re.kr/handle/201004/10260
ISSN
0374-4914
Appears in Collections:
KIST Publication > Article
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