Design and fabrication of a micro switch for logic devices

Title
Design and fabrication of a micro switch for logic devices
Authors
채경수한승오하종민박정호문성욱
Keywords
mechanical switch; MEMS; logic device; electrostatic actuator; threshold voltage
Issue Date
2000-04
Publisher
2000년도 MEMS 학술대회 논문집; THe 2nd Korean Mems Conference
Citation
VOL 2, 269-275
URI
http://pubs.kist.re.kr/handle/201004/10296
Appears in Collections:
KIST Publication > Conference Paper
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