KIST Library Institutional Repository

Ni Electrodeposition in Sub-micrometer Trenches

Authors

Soo-Kil Kim; John E. Bonevich; Daniel Josell; Thomas P. Moffat

Citation

International Soiciety of Electrochemistry

Keywords

Ni; Electrodeposition; trench; leveling

URI

https://pubs.kist.re.kr/handle/201004/103285

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML