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Large area 3D nanoscale metal etching process

Other Titles

대면적 3D 나노스케일 금속 에칭 방법

Authors

Kim Moo Hyun; Lee, Byung Chul; C. Jegatha; Kim Sang Kyung; Shin, Hyun Joon; Kim, Jung Sik; Moon, Sung Wook

Citation

제 9회 한국 MEMS 학술대회 논문집(2007년 4월 5-7일), pp.642 - 645

Keywords

무전해도금; 선택적 습식식각; 나노에칭 공정; MEMS; NEMS; electroless plating; selective wet etching; etching process

URI

https://pubs.kist.re.kr/handle/201004/103593

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KIST Conference Paper > Others

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