Theoretical calculation of resonance force and mass sensitivity of PZT thick film cantilever with respect to thick film porosity

Authors
JAE HONG PARKKwon Tae-YunKim, Tae Song김환Yoon, Dae Sung
Citation
ISIF 2006
Keywords
압전후막; 스크린프린팅; 강유전특성
URI
https://pubs.kist.re.kr/handle/201004/103615
Appears in Collections:
KIST Conference Paper > Others
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