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O2 plasma assisted low temperature hydrophilic bonding of inP and GGG(Gd3Ga5O12) for optoelectronic integrated devices

Authors

Roh Jong Wook; J.S. Yang; Woo, Deok Ha; Byun, Young Tae; Jhon, Young Min; T. Mizumoto; W.Y. Lee; Lee, Seok

Citation

IUMRS-ICA2006, v.8-P-18, pp.132

URI

https://pubs.kist.re.kr/handle/201004/103667

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KIST Conference Paper > Others

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