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Effect Of Silicon Carbide Passivation Films On The Resonance Characteristics Of Cantilever Sensor

Authors

CHOI KI YONG; 최덕균; 최두진; Yoon, Dae Sung; Kim, Tae Song

Citation

ISIF 2006

Keywords

SiC; passivation

URI

https://pubs.kist.re.kr/handle/201004/103698

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KIST Conference Paper > Others

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