A study on the ZnO thin film SAW filter by RF sputter

Title
A study on the ZnO thin film SAW filter by RF sputter
Authors
박용욱신현용박정흠강종윤심성훈최지원윤석진김현재김경환최형욱
Keywords
ZnO thin film; preferred orientation; resistivity; RF magnetron sputter; SAW; Propagation velocity; Insertion loss
Issue Date
2001-06
Publisher
TEEM (한국전기전자재료학회)
Citation
VOL 14, NO 6, 481-486
Abstract
ZnO thin films on glass substrate were depostied by RF magnetron reactive sputter with various argon/oxygen gas ratios and substrate temperatures. Crystallinities, surface morphologies, chemical compositions, and electrical properties of the films were investigated by XRD, SEM, XPS and electrometer(keithley 617). All films showed a strong preferred orientation along the c-axis on glass substrate, and the chemical stoichiometry was obtained at Ar/O$_2$.=50/50. The propagation velocity of ZnO SAW filter was about 2,590 m/sec and insertion loss was a minimum value of abut -21dB.
URI
http://pubs.kist.re.kr/handle/201004/10397
ISSN
1229-7607
Appears in Collections:
KIST Publication > Article
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