DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorHequing Li-
dc.contributor.authorLee Hak Joo-
dc.contributor.authorJONG-KEUK, PARK-
dc.contributor.authorJeung-hyun Jeong-
dc.contributor.authorBaik, Young Joon-
dc.contributor.authorLee, Wook Seong-
dc.date.accessioned2024-01-13T07:03:07Z-
dc.date.available2024-01-13T07:03:07Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/103982-
dc.languageEnglish-
dc.subjectNanodiamond-
dc.subjectHFCVD-
dc.subjectWafer-
dc.subjectgrain size-
dc.subjectuniformity-
dc.titleLow-Temperature Deposition of Nanocrystalline Diamond Film by Plasma-assisted Hot Filament CVD-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationMaterials Research Society 2006 Fall Meeting-
dc.citation.titleMaterials Research Society 2006 Fall Meeting-
dc.citation.conferencePlaceUS-
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