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MEMS Fabrication of Microchannel with Poly-Si Layer for Application to Microchip Electrophoresis

Other Titles

마이크로 칩 전기영동에 응용하기 위한 다결정 실리콘 층이 형성된 마이크로 채널의 MEMS 가공 제작

Authors

Kim Tae Ha; Lee Intaek; Myung-Suk Chun; Lee Kangtaek

Citation

한국화학공학회 추계

Keywords

MEMS Fabrication; Microchip Electrophoresis; Quartz; Glass; Poly-Silicon; Etching

URI

https://pubs.kist.re.kr/handle/201004/103984

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KIST Conference Paper > Others

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