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dc.contributor.authorChun Dong Won-
dc.contributor.authorHwang Kyo Seon-
dc.contributor.authorJeong Hoon Lee-
dc.contributor.authorKilho Eom-
dc.contributor.authorCha Byung Hak-
dc.contributor.authorWoo Young Lee-
dc.contributor.authorYoon, Dae Sung-
dc.contributor.authorKim, Tae Song-
dc.date.accessioned2024-01-13T07:03:43Z-
dc.date.available2024-01-13T07:03:43Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104024-
dc.languageEnglish-
dc.titleResonant characteristic of the PZT thin film microcantilever with mass sensitivity of femto-gram level for biomolecule detection-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationKorea MEMS Conference-
dc.citation.titleKorea MEMS Conference-
dc.citation.conferencePlaceKO-
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KIST Conference Paper > Others
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