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Formation of 30 nm GaAs Nanohole Array by ICP-RIE using Nanoporous Alumina Mask

Authors

Mi Jung; Byun, Young Tae; Jhon, Young Min; Lee, Seok; Kim, Sun Ho; Mho,Sun-il; Woo, Deok Ha

Citation

82회 한국물리학회 학술논문발표, pp.99

Keywords

GaAs Nanohole Array; ICP-RIE; Nanoporous Alumina Mask

URI

https://pubs.kist.re.kr/handle/201004/104060

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KIST Conference Paper > Others

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