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dc.contributor.authorJung mi-
dc.contributor.authorJung Yong-Woo-
dc.contributor.authorLee, Seok-
dc.contributor.authorByun, Young Tae-
dc.contributor.authorJhon, Young Min-
dc.contributor.authorKim, Sun Ho-
dc.contributor.authorMho,Sun-il-
dc.contributor.authorWoo, Deok Ha-
dc.date.accessioned2024-01-13T08:02:22Z-
dc.date.available2024-01-13T08:02:22Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104452-
dc.languageEnglish-
dc.subjectGaAs nanohole-
dc.subjectNanoporous alumina-
dc.subjectICP-RIE-
dc.titleFormation of GaAs Nanohole Array using Nanoporous Alumina Mask by Inductively Coupled Plasma Reactive Ion Etching-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제 13회 한국반도체학술대회, pp.1125 - 1126-
dc.citation.title제 13회 한국반도체학술대회-
dc.citation.startPage1125-
dc.citation.endPage1126-
dc.citation.conferencePlaceKO-
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