Implementation of a self-sensing MEMS cantilever for nanomanipulation

Title
Implementation of a self-sensing MEMS cantilever for nanomanipulation
Authors
김덕호김경환홍재완
Keywords
atomic force microscope(AFM); self-sensing; MEMS; cantilever; nanomanipulation; piezoresistive
Issue Date
2002-03
Publisher
제 4 회 MEMS 학술대회 논문집; The 4th Korean MEMS Conference
Citation
, 120-125
URI
http://pubs.kist.re.kr/handle/201004/10461
Appears in Collections:
KIST Publication > Conference Paper
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