Growth and characterizaton of SiC film using single precursors

Other Titles
단일 전구체를 이용한 SiC 박막의 성장과 특성평가
Authors
KIM NA-RIKim, Jae Soo변동진이재훈노대호진정근
Citation
2004년 추계 세라믹학회, pp.137
URI
https://pubs.kist.re.kr/handle/201004/104612
Appears in Collections:
KIST Conference Paper > Others
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