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dc.contributor.author김덕호-
dc.contributor.author김경환-
dc.contributor.author홍재완-
dc.date.accessioned2015-12-02T04:54:33Z-
dc.date.available2015-12-02T04:54:33Z-
dc.date.issued200203-
dc.identifier.citation, 120-125-
dc.identifier.other15958-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/10461-
dc.publisher제 4 회 MEMS 학술대회 논문집-
dc.publisherThe 4th Korean MEMS Conference-
dc.subjectatomic force microscope(AFM)-
dc.subjectself-sensing-
dc.subjectMEMS-
dc.subjectcantilever-
dc.subjectnanomanipulation-
dc.subjectpiezoresistive-
dc.titleImplementation of a self-sensing MEMS cantilever for nanomanipulation-
dc.typeConference Paper-
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KIST Publication > Conference Paper
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