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dc.contributor.authorJAE HONG PARK-
dc.contributor.authorKwon Tae-Yun-
dc.contributor.authorKIM, HYUNG JOON-
dc.contributor.authorKIM SEUNG RAE-
dc.contributor.authorYoon, Dae Sung-
dc.contributor.author천채일-
dc.contributor.authorKim, Tae Song-
dc.date.accessioned2024-01-13T08:31:17Z-
dc.date.available2024-01-13T08:31:17Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104640-
dc.languageEnglish-
dc.subjectthick film-
dc.subjectcantilever-
dc.titleResonance Properties and Mass sensitivity of microcantilever sensors actuated by piezoelectric PZT thick films-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationInternational conference on Electroceramics (ICE-2005)-
dc.citation.titleInternational conference on Electroceramics (ICE-2005)-
dc.citation.conferencePlaceUS-
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