Growth of SiCN nanowires grown by CVD using metal catalyst

Other Titles
금속촉매와 기상화학증착법을 이용한 SiCN 나노와이어의 성장
Authors
노대호Kim, Jae Soo변동진이재훈KIM NA-RIAhn myoung-won양재웅
Citation
2005년도 한국재료학회 추계학술대회, pp.274
Keywords
metal catalyst; SiCN nanowire; CVD
URI
https://pubs.kist.re.kr/handle/201004/104669
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KIST Conference Paper > Others
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