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dc.contributor.authorRoh Jong Wook-
dc.contributor.authorYANG, JEONG SU-
dc.contributor.author옥성해-
dc.contributor.authorLee, Seok-
dc.contributor.authorWoo, Deok Ha-
dc.contributor.authorByun, Young Tae-
dc.contributor.authorJhon, Young Min-
dc.contributor.author이우영-
dc.date.accessioned2024-01-13T08:33:39Z-
dc.date.available2024-01-13T08:33:39Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104805-
dc.languageEnglish-
dc.subjectO2 플라즈마-
dc.subjectGGG-
dc.subjectInP-
dc.subject웨이퍼 직접 접합-
dc.titleWafer direct bonding between InP and GGG(Gd3Ga5O12) using O2 plasma-
dc.title.alternativeO2 플라즈마를 이용한 InP와 GGG 간의 웨이퍼 직접 접합-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationPhotonics Conference 2005, pp.191 - 192-
dc.citation.titlePhotonics Conference 2005-
dc.citation.startPage191-
dc.citation.endPage192-
dc.citation.conferencePlaceKO-
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