Investigation of amorphous carbon film deposition by molecular dynamic simulation

Title
Investigation of amorphous carbon film deposition by molecular dynamic simulation
Authors
이승협이승철이규환이광렬
Keywords
다이아몬드상 카본
Issue Date
2003-03
Publisher
한국진공학회지
Citation
v. 12, no. 1, 25-34
URI
http://pubs.kist.re.kr/handle/201004/10508
Appears in Collections:
KIST Publication > Article
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