Uncooled infrared sensor by MEMS technology

Other Titles
MEMS 기술로 제작된 비냉각형 적외선 센서
Authors
HAN YONG HEEKim Kun TaeShin, Hyun JoonAn Mi SukKim, Shin KeunMoon, Sung WookChoi In-HoonOh Myung-Hwan
Citation
한국재료학회 추계학술대회
Keywords
MEMS; 볼로메타; 적외선 센서
URI
https://pubs.kist.re.kr/handle/201004/105296
Appears in Collections:
KIST Conference Paper > Others
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