Nanotribological characteristics of plasma treated hydrophobic thin films on silicon surfaces using SPM

Title
Nanotribological characteristics of plasma treated hydrophobic thin films on silicon surfaces using SPM
Authors
윤의성박지현양승호한흥구공호성고석근
Keywords
nano-adhesion; nano-friction; hydrophobic film; tribology; SPM
Issue Date
2003-04
Publisher
한국윤활학회지
Citation
v. 19, no. 2, 109-115
URI
http://pubs.kist.re.kr/handle/201004/10531
ISSN
1229-4845
Appears in Collections:
KIST Publication > Article
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