Fabrication of photoresist V-groove for alignment of micro optical elements

Title
Fabrication of photoresist V-groove for alignment of micro optical elements
Authors
이준섭신현준송석호김필수오차환문성욱
Keywords
감광제; V-groove; 식각; 광소자
Issue Date
2003-05
Publisher
제 10 회 광전자 및 광통신 학술회의
Citation
, 555-556.
URI
http://pubs.kist.re.kr/handle/201004/10532
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE